Technical Specifications |
| Range of motion (Nano-OPH30) | 30 μm |
Range of motion (Nano-OPH50)
| 50 μm |
| Range of motion (Nano-OPH100) | 100 μm |
| Resolution (30/50/100 μm) | 0.06/0.1/0.2 nm |
| Resonant Frequency | 3.5 kHz ±20% |
| Resonant Frequency (100g load) | 1.5 kHz ±20% |
| Stiffness | 3.0 N/μm ±20% |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤2 μrad |
| Recommended max. load (horizontal)* | 1.0 kg |
| Recommended max. load (vertical)* | 0.5 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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