返回 Excel 661 UC 影像测... 返回 Excel 661 UC 影像测... 
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技术参数
| Excel 661HM/HC | Excel 662HM/HC | Excel 661 UM/UC | Excel 662UM/UC | Excel 664 UM/UC | |
| 量测行程(mm) | 650x680x160 | 650x680x250 | 650x680x160 | 650x680x250 | 650x680x400 |
| 承载重量 | 100kg | ||||
| XY轴精度(μm) | 2.8+L/200 | 3.1+L/200 | 2.5+L/200 | 2.8+L/200 | 3.5+L/150 |
| Z轴精度(μm) | 2.8+L/100 | 3.3+L/100 | 2.5+L/100 | 3.0+L/100 | 3.8+L/100 |
| 解析度 | 0.4μm | 0.1μm | |||
| 基本倍率 | 1X(LWD)/2X(SWD) | ||||
| 光学变焦 | 6.5x | 12x | |||
| 数位变焦 | 3x | ||||
| 综合倍率 | 20x-370x/40x-740x | 15x-540x/30x-1080x |