FEI “Q系列”扫描电...
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分辨率加速
电压		探针电流 样品台放大率试件室尺寸
Q25 SEM

High vacuum 

  • 3.0 nm at 30 kV (SE)

  • 4.0 nm at 30 kV (BSE)*

  • 8.0 nm at 3 kV (SE)

Low vacuum

  • 3.0 nm at 30 kV (SE)

  • 4.0 nm at 30k V (BSE)*

  • 10 nm at 3 kV (SE)

*optional

200 V - 30 kVup to 2 μA, continuously adjusted13 to 1000000x284 mm size left to right
Q45 SEM

High vacuum 

  • 3.0 nm at 30 kV (SE)

  • 4.0 nm at 30 kV (BSE)*

  • 8.0 nm at 3 kV (SE)

High vacuum with beam deceleration option 7.0 nm at 3 kV(BD mode* + vCD*) 

Low vacuum

  • 3.0 nm at 30 kV (SE)

  • 4.0 nm at 30k V (BSE)*

  • 10 nm at 3 kV (SE)

Extended vacuum mode (ESEM)
3.0 nm at 30 kV (SE) 

*optional






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