Lyncee Tec MEMS全息测振分析仪_ 参数_指标_优点_优势

参数指标

Features	DHM®	3D LDV	LDV
Dynamic topography	√	×	×
3D vibrations (X,Y,Z)	XYZ	XYZ	Z only
Maximum frequency	25 MHz	25 MHz	up to 1.2 GHz
Full field measurement	√	with XY scanning	with XY scanning
Diffraction limited resolution	√	limited by laser spot size	limited by laser spot size
Objective turret	√	×	×
No need of sample preparation	√	–	×
Measurement of complex structures	√	×	×
Measurement of complex motions (simultaneous in-, out- of plane, tilt, … )	++	–	–
Measurement of in-plane displacement lager than MEMS structures	√	×	×