超精密光学应力测量设...
参数指标我要纠错


 

参数

 


高精度测量系统选项

大范围相位延迟量测量选项

相位延迟量范围:

0.005 to 120+   nm

0.005 to 300+   nm

相位延迟量测量分辨率/
  重复精度1, 2, 3:

0.001 nm / ±   0.008 nm

0.0

1 nm / ± 0.015   nm

角度测量分辨率 /
  重复精度1:

0.01o / ±   0.05°

0.01o / ±   0.07°

测量速率 / 时间4:

up to 100 pps   /
  sample size dependent


尺寸:

910 mm (H) x   415 mm (W) x 700 mm (D)


光源波长5:

Various (632.8   nm standard)


测量光斑6:

Between 1 mm   and 3 mm native
  (can be as low as 50 μm)


内置测量调制频率:

PEMLabsTM Photoelastic   Modulator
  50 kHz or 50/60 kHz


解调分析技术:

Hinds   Instruments SignalocTM
  Lock-in Amplifier or Wave Form
  Capture Card


测量单位:

nm   (retardation), ° (angle)


 

1 Typical performance at 5 nm retardation

2 Up to 0.8 nm, 1% thereafter

3 Up to 1.5 nm, 1% thereafter

4 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.

5 Custom wavelengths available

6Spot sizes of less that 1 mm native require optional high resolution detector module

 

 

选项:

    * Additional Polarization Parameters

    * 超高速扫描选项

    * 光谱扫描测量和RGB测量

    * 客户定制内置波长选项(紫外/红外)

    * 手动/自动倾斜位移平台装置

    * 定制样品平台加持谁记

    * 定制化显示界面 (UI or DLL)

    * 应力计算评估软件




相关其他包装业专用