Number of actuators

69

88

97

97

241

277

468

820

Pupil diameter

10.5 mm

20.0 mm

7.2 mm

13.5 mm

37.5 mm

24.5 mm

33.0 mm

45.0 mm

Pitch

1.5 mm

2.5 mm

0.8 mm

1.5 mm

2.5 mm

1.5 mm

Maximum mirror best flat in close loop

7.0 nm RMS (no print through effects)

Minimum tip/tilt stroke (PV, wavefront)

60 μm

40 μm

80 μm

60 μm

40 μm

15 μm

Minimum focus/astig. stroke (PV, wavefront)

40 μm

30 μm

40 μm

40 μm

30 μm

10 μm

Minimum 3x3 stroke (PV, wavefront)

> 25 μm

> 10 μm

Maximum settling time (at +/-1 0%)

800 μs

1.6 ms

800 μs

1.6 ms

500 μs

Minimum bandwidth*

> 750 Hz

> 400 Hz

> 750 Hz

> 400 Hz

> 2 000 Hz

Minimum frequency at phase lag of 45°

> 500 Hz

> 300 Hz

> 500 Hz

> 300 Hz

> 1 500 Hz

Hysteresis error

<2%

Nonlinearity error

<3%

Coating*

银膜R>96.5%@0.5μm~2μm

Operating temperature

-10 to 35°C