技术参数：

测量系统
 测量头部                           AFM和STM测量头全内置、全自动切换
                                            可选配液相模式和纳米压痕测量头
 
 zei大样品尺寸 Up to 20 mm in diameter; up to 10 mm in height
 直径20mm，厚度10mm
 Sample weight
 zei大样品重量 Up to 100 g
 100g
 XY sample positioning
 XY样品定位装置 5x5 mm, motorized, video monitored
 移动范围5X5mm，软件控制电动定位
 Minimum XY sample positioner step
 XY样品定位装置zei小步进 0.3 μm
 Scanning field
 扫描范围 100x100x10 μm with closed-loop sensors;
 100X100X10um，三维全量程闭环控制扫描器
 3x3x2 μm in the low voltage mode
 3x3x2 μm，低电流模式扫描器
 Nonlinearity, XY
 XY方向非线性度 <=0.1 % (with closed-loop sensors)
 <=0.1 % (闭环控制扫描器)
 Noise level Z (RMS in the bandwidth of 10–1000 Hz)
 Z方向噪音水平（带宽10~1000Hz时的RMS值） 0.03 nm (typically), 0.04 nm (maximum) — with closed-loop sensors; 0.02 nm in the low voltage mode
 闭环控制扫描器，典型值0.03nm，zei大0.04nm
 低电流模式扫描器，0.02nm
 Optical system for cantilever deviation registration
 激光光路系统 Motorized, automated system alignment
 电动调节，全自动准直
 Video monitoring system
 视频显微镜系统 Motorized continuous zooming, focusing, sample location positioning, resolution 2 μm
 软件控制电动变焦和连续变倍，软件控制变换视野，分辨率2um
 Temperature control of the sample
 样品温度控制 Room temperature up to 150°C
 室温~150°C