Table I | ||||
Grating | First-order Marker wavelength* (nm) | Lines/mm (non-tilted) | Lines/mm (tilted) | Tilt angle (deg) |
Primary | na | 1200 | 1200 | 0 |
1 | 400 | 758.6 | 760.6 | 4.158 |
2 | 500 | 948.2 | 949.8 | 3.329 |
3 | 600 | 1137.7 | 1139.1 | 2.775 |
4 | 700 | 1327.4 | 1328.6 | 2.379 |
5 | 800 | 1517.2 | 1518.2 | 2.082 |
6 | 900 | 1706.7 | 1707.6 | 1.851 |
7 | 500 | 948.2 | 949.8 | 3.329 |
8 | 550 | 1043.0 | 1044.4 | 3.025 |
9 | 600 | 1137.7 | 1139.1 | 2.775 |
10 | 650 | 1232.6 | 1233.9 | 2.560 |
11 | 700 | 1327.4 | 1328.6 | 2.379 |
12 | 750 | 1422.2 | 1423.3 | 2.219 |
* First-order marker wavelength is the wavelength of light diffracted from the primary grating which falls at the same output angle as the HeNe marker signal from the referenced alignment/calibration grating. Note that alignment/calibration gratings produce additional HeNe markers at higher orders and that the marker wavelength is simply multiplied by the order number. |
标准校准光栅列表
典型光栅厚度约为0.73毫米。基板高度和宽度的公差为0.3mm。光栅基片:单晶硅。光栅镀膜:铝(其他镀膜类型可选)。
Primary Grating Line Density (lines/mm) | alignment/calibration gratings | orientation | Size | Part number |
1200 | 1-6 or 7-12 | Non-tilt | 12.5 mm × 12.5 mm | CNG-C12-1212A-Al |
1200 | 1-12 | Non-tilt | 25 mm × 25 mm | CNG-C12-2525A-Al |
1200 | 1-6 or 7-12 | Tilt | 12.5 mm × 12.5 mm | CTG-C12-1212A-Al |
1200 | 1-12 | Tilt | 25 mm × 25 mm | CTG-C12-2525A-Al |