衍射光栅--自校准光栅
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Table I





Grating

First-order Marker wavelength* (nm)

Lines/mm (non-tilted)

Lines/mm (tilted)

Tilt angle (deg)

Primary

na

1200

1200

0

1

400

758.6

760.6

4.158

2

500

948.2

949.8

3.329

3

600

1137.7

1139.1

2.775

4

700

1327.4

1328.6

2.379

5

800

1517.2

1518.2

2.082

6

900

1706.7

1707.6

1.851

7

500

948.2

949.8

3.329

8

550

1043.0

1044.4

3.025

9

600

1137.7

1139.1

2.775

10

650

1232.6

1233.9

2.560

11

700

1327.4

1328.6

2.379

12

750

1422.2

1423.3

2.219

* First-order marker wavelength is the wavelength of light diffracted from the primary grating which falls at the same output angle as the HeNe marker signal from the referenced alignment/calibration grating. Note that alignment/calibration gratings produce additional HeNe markers at higher orders and that the marker wavelength is simply multiplied by the order number.





标准校准光栅列表

典型光栅厚度约为0.73毫米。基板高度和宽度的公差为0.3mm。光栅基片:单晶硅。光栅镀膜:铝(其他镀膜类型可选)。

Primary Grating Line Density (lines/mm)

alignment/calibration gratings

orientation

Size

Part number

1200

1-6 or 7-12

Non-tilt

12.5 mm × 12.5 mm

CNG-C12-1212A-Al

1200

1-12

Non-tilt

25 mm × 25 mm

CNG-C12-2525A-Al

1200

1-6 or 7-12

Tilt

12.5 mm × 12.5 mm

CTG-C12-1212A-Al

1200

1-12

Tilt

25 mm × 25 mm

CTG-C12-2525A-Al