• BS-04 系列 旋转式传感器

• 晶振膜厚控制仪的传感器，可装载6个或12个晶振片 。

The BS-04 series rotary sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate in a vacuum deposition process. When a crystal failure occurs, the crystal moves automatically and enable continuous process by using the next crystal. The detector aperture is in a fixed position that there is no need to change the tooling factor for each crystal movement..
bs-04系列的旋转传感器用于晶体振荡型薄膜厚度控制器和用于在真空沉积过程中沉积速率监控。当晶体发生故障，晶体自动移动并用下晶体使连续的过程。探测器的孔径在一个固定的位置，不需要改变模具因素，每个晶体的运动。
The two types of sensor head that can be used according to the mounting position: the aflat type and the 45 degrees type. Both are useful for high volume and long term vacuum deposition processes.
这两种类型的传感头，可根据安装位置的平板型和45度型。无论是用于高容量和长期的真空沉积工艺。

Features特点

BS-04series Rotary Sensor

A sensor for a crystal oscillator film-thickness controller incorporating 6 or 12 crystals

Used to measure the film thickness and film generation rate during thin film processing.

When a crystal fails, the sensor can be used as is by switching to the next crystal.

Since the detector aperture is at a fixed position, it is not necessary to change the Tooling Factor for each crystal shift.

There are 2 types of sensor heads; flat and 45°. These can be used selectively according to the mounting position.

Suitable for long-term, high volume vacuum deposition or sputtering processes.