DIN EN ISO 14644-4 E:2021 洁净室和相关受控环境 第4部分：设计、建造和启动 (ISO/DIS 14644-4:2021) 草案
Draft Document – Cleanrooms and associated controlled environments – Part 4: Design, construction and start-up (ISO/DIS 14644-4:2021); German and English version prEN ISO 14644-4:2021