BS ISO 14644-12:2018
洁净室和相关受控环境 通过纳米级颗粒浓度监测空气清洁度的规范
Cleanrooms and associated controlled environments - Specifications for monitoring air cleanliness by nanoscale particle concentration
- 标准号
- BS ISO 14644-12:2018
- 发布
- 2018年
- 发布单位
- 英国标准学会
- 当前最新
- BS ISO 14644-12:2018
- 1 Scope This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only pop...