GSO IEC/IEEE 62659:2021
纳米制造 纳米电子学的大规模制造

Nanomanufacturing - Large scale manufacturing for nanoelectronics

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标准号

GSO IEC/IEEE 62659:2021

发布

2021年

发布单位

GSO

当前最新

GSO IEC/IEEE 62659:2021

 

 

适用范围

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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