ISO/TR 15969-2001
表面化学分析 深度描述 溅射深度测量
Surface chemical analysis - Depth profiling - Measurement of sputtered depth
购买全文，请联系:
- 适用范围
- This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres.