DIN 28429-2003
真空技术.溅射离子泵验收规范

Vacuum technology - Acceptance specifications for getter ion pumps

标准号

DIN 28429-2003

发布日期

2003年04月

实施日期

废止日期

无

中国标准分类号

J78

国际标准分类号

23.160

发布单位

DE-DIN

代替标准

DIN 28429-2014

适用范围

The document purpose of this Standard is to ensure that the evaluation of the features of a Ion Getter pump is to be done under uniform proceedings and conditions. It should be achieved, that the measures done by different manufacturers and labs and the information given in catalogues are in principle comparable.#,,#