DIN EN 62047-9-2012 半导体器件.微型机电器件.第9部分:微机电系统硅片的硅片键合强度试验(IEC 62047-9-2011).德文版本 EN 62047-9-2011
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (IEC 62047-9:2011); German version EN 62047-9:2011