ASTM F1372-1993(2012)
气体分配系统组件用金属表面状态的扫描式电子显微镜 (SEM) 分析的标准试验方法

Standard Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components

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标准号

ASTM F1372-1993(2012)

发布日期

1993年

实施日期

废止日期

无

国际标准分类号

17.040.20 (Properties of surfaces)

发布单位

美国材料与试验协会

适用范围

4. Significance and Use

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4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.

1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.

1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.

1.3 Limitations:

1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.

1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.

1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

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