DIN EN ISO 14644-10:2013 洁净室和相关控制环境. 第10部分: 采用化学浓度法对表面洁净度的分类(ISO 14644-10-2013); 德文版本EN ISO 14644-10-2013
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013); German version EN ISO 14644-10:2013