VDI 2083 Blatt 2-2015
洁净室技术 关于检查和监控是否持续符合规范的规定
Cleanroom technology - Stipulations regarding the checking and monitoring of continued compliance with specifications
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- 标准号
- VDI 2083 Blatt 2-2015
- 发布
- 2015年
- 发布单位
- 德国机械工程师协会
- 适用范围
- This standard specifies requirements for the scheduled checking of a cleanroom or associated controlled environment for the purpose of proving continued compliance. The requirements make reference to functional tests for installation operation described in VDI 2083 Part 1 and VDI 2083 Part 3 as well as DIN EN ISO 14644-1 and DIN EN ISO 14644-3. The described functional tests include visual inspection, determination of the volume flow rate and air change rate of rooms, filter leak tests, determination of filter pressure differential and pressure difference between rooms, air cleanliness classification, determination of recovery time, measurements of temperature, sound pressure level and illuminance.
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