23.160 真空技术 标准查询与下载
共找到 461 条与 真空技术 相关的标准，共 31 页
本标准规定了真空泵、真空机组、真空阀门和真空镀膜机型号的编制方法。本标准适用于上述各种真空设备的型号编制。
Vacuum technology - Methods for compiling vacuum equipment models
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-12-20
- 实施
- 2012-04-01
This International Standard specifies the physical, technical and metrological conditions to be fulfilled when calibrations of vacuum gauges are performed by direct comparison with a reference gauge. From the conditions described, the design of an apparatus that can perform vacuum gauge calibrations in an adequate manner can be deduced. The vacuum gauges to be calibrated can be of any kind. Many types of gauges consist of several parts. Typically, these are: gauge head, cable, operational device and signal read out. This entire set is considered as the unit that has to be calibrated. Whereas, if only the gauge head (i.e. the part of the vacuum gauge directly exposed to the vacuum) is calibrated, all set-ups and conditions would have to be recorded such that the user of the calibrated gauge head would be able to perform the measurements in the same manner as during the calibration. The reference gauge is either a calibrated gauge, traceable to a vacuum primary or national standard (normal case), with a calibration certificate according to ISO/IEC 17025, or an absolute measuring instrument (rare case), traceable to the SI units and to which a measurement uncertainty can be attributed. This International Standard does not give guidance on how to treat special types of vacuum gauges, be they reference standards or units under calibration; it is intended that such guidance be given in other International Standards. The pressure range for calibrations treated in this International Standard depends on the realized design of the calibration apparatus and on the type of reference gauge. The range varies in its limits from 10 −6 Pa to 110 kPa. The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO/IEC Guide 98-3, Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) ISO/IEC 17025:2005, General requirements for the competence of testing and calibration laboratories 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. 3.1 primary standard measurement standard established using a primary reference measurement procedure ISOURCE: ISO/IEC Guide 99:2007, 5.4, modified] 3.2 national standard measurement standard recognized by national authority to serve in a state or economy as the basis for assigning quantity values to other measurement standards for the kind of quantity concerned ISOURCE: ISO/IEC Guide 99:2007, 5.3] 1
Vacuum gauges - Calibration by direct comparison with a reference gauge
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-12-01
- 实施
Vacuum technology. Vacuum gauges. Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-08-31
- 实施
- 2011-08-31
本标准规定了涡旋干式真空泵的术语和定义、型式与基本参数、技术要求、测量方法、抽样及判定方法、检验规则、标志、包装、运输和贮存。 本标准适用于涡旋干式真空泵（以下简称泵）。
Vacuum technology.Scroll dry pump
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-08-15
- 实施
- 2011-11-01
本标准规定了制冷机低温泵（以下简称低温泵）的术语和定义、结构与基本参数、一般要求、主要性能测试、质量评定以及标志、包装、运输和贮存。 本标准适用于外接式氦制冷机低温泵。
Vacuum technology.Refrigerator cooled cryopumps
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-08-15
- 实施
- 2011-11-01
Vacuum technology - Vacuum gauges - Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
- ICS
- 23.160
- CCS
- J78
- 发布
- 2011-08
- 实施
Vacuum technology. Standard methods for measuring vacuum-pump performance
- ICS
- 23.160
- CCS
- 发布
- 2011
- 实施
- 2012-07-01
Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
- ICS
- 23.160
- CCS
- N68
- 发布
- 2010-03-31
- 实施
- 2010-03-31
Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown torque
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-02-28
- 实施
- 2010-02-28
本标准规定了真空溅射镀膜设备的基本参数、技术要求、试验方法、检验规则、标志、包装、运输和贮存等。 本标准适用于压力在1×10Pa～1×10pa范围的真空溅射镀膜设备。
Vacuum sputtering coating plant
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-02-11
- 实施
- 2010-07-01
本标准规定了真空离子镀膜设备的型式与基本参数、技术要求、设备检验及其品质评价、质量承诺及标志、包装、运输和贮存。 本标准适用于： 电弧蒸发离子镀膜设备； 电子束蒸发离子镀膜设备； 磁控溅射离子镀膜设备； 上述三类离子镀膜设备的组合。 其他类型的具有离子镀膜特征的设备可参照执行本标准。
Vacuum ion coating plant
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-02-11
- 实施
- 2010-07-01
本标准规定了单级旋片真空泵的型式与基本参数、技术要求、抽样及判定方法、试验方法、检验规则、标志、包装、运输和贮存。 本标准适用于单级油封旋片真空泵。
Single stage rotary vane vacuum pumps
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-02-11
- 实施
- 2010-07-01
This International Standard specifies a method for the measurement of rapid shutdown torque (destructive torque) of turbomolecular pumps in which gas momentum is produced by axial flow type blades and/or helical channels. The main forces leading to failure of turbomolecular pumps are torques around the rotational axis. Other insignificant forces and moments that can occur lie outside the scope of this International Standard. There are two kinds of failure: rapid shutdown by whole burst and softer crash of rotor. This International Standard applies to both. The same measurement method can be used for turbomolecular pumps and molecular drag pumps.
Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown torque
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-02-01
- 实施
Vacuum technology - Valves - Leak test
- ICS
- 23.160
- CCS
- J78
- 发布
- 2010-01-31
- 实施
- 2010-01-31
Vacuum technology. Valves. Leak test
- ICS
- 23.160
- CCS
- 发布
- 2010-01-31
- 实施
- 2010-01-31
Vacuum equipment. Vapour vacuum pumps. Measurement of performance characteristics. Part 2. Measurement of ultimate pressure and critical backing pressure
- ICS
- 23.160
- CCS
- 发布
- 2010
- 实施
- 2011-07-01
Vacuum equipment. Positive-displacement vacuum pumps. Measurement of performance characteristics. Part 2. Measurement of ultimate pressure
- ICS
- 23.160
- CCS
- 发布
- 2010
- 实施
- 2011-07-01
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum. 1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Standard Specification for Dimensions of Knife-Edge Flanges
- ICS
- 23.160
- CCS
- J15
- 发布
- 2010
- 实施
Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
- ICS
- 23.160
- CCS
- J78
- 发布
- 2009-12
- 实施
