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主要参数
| TEM分辨率 ( 200 kV) | Point image 0.21 nm Lattice image 0.10 nm Information limit 0.11 nm |
STEM分辨率(at 200 kV) | STEM DF image 0.136 nm STEM BF image 0.136 nm |
电子枪 | Schottky field emission gun, ZrO/W(100) emitter |
加速电压 | 60 to 200 kV (80, 200 kV; standard, Other voltages; option) |
样品移动 | X, Y: ± 1.0 mm Z: ± 0.2 mm |
样品倾斜角度 | TX/TY (with Specimen Tilting; Holder)±20°/±25° TX (with Specimen High Tilting Holder)±80° |
可选 | Energy dispersive X-ray spectrometer(EDS), Electron energy-loss spectrometer (EELS), Multi-specimen auto transfersystem, Integrated TEM control system (Automation Center), TEM/STEM tomography system |