KS D ISO 15632-2023 微束分析.与扫描电子显微镜(SEM)或电子探针微量分析仪(EPMA)一起使用的能量色散X射线光谱仪(EDS)的规范和检查所选仪器性能参数
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS) for use with a scanning electron microscope(SEM) or a