BS ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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- 标准号
- BS ISO 22278:2020
- 发布
- 2020年
- 发布单位
- 英国标准学会
- 当前最新
- BS ISO 22278:2020
- 适用范围
- What is ISO 22278 about? ISO 22278 specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with a parallel X-ray beam. ISO 22278 applies to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure. Who is ISO 22278 for? ISO 22278 on crystalline quality of the single-crystal thin film is useful for: Ceramic manufacturers Mechanical engineers