This International Standard specifies a standard test piece@ which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 ?m@ which are main structural materials for microelectromechanical systems (MEMS)@ micromachines and similar devices. This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy@ when the measured tensile strengths of the standard test pieces@ whose tensile strength is pre-determined@ are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
62047-3-2006由IEC - International Electrotechnical Commission 发布于 2006-08-01,并于 2006-08-16 实施。
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