62047-3-2006 Semiconductor devices – Micro-electromechanical devices – Part 3: Thin film standard test piece for tensile testing (Edition 1.0)
Dispositifs à semiconducteurs – Dispositifs microélectromécaniques – Partie 3: Eprouvette d'essai normalisée en couche mince pour l'essai de traction (Edition 1.0)
This International Standard specifies a standard test piece@ which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 ?m@ which are main structural materials for microelectromechanical systems (MEMS)@ micromachines and similar devices. This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy@ when the measured tensile strengths of the standard test pieces@ whose tensile strength is pre-determined@ are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.