GSO ISO 14644-15:2021 洁净室和相关受控环境 第15部分:通过空气中化学浓度评估设备和材料的使用适宜性
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and as...