GSO ISO 14644-15:2021
洁净室和相关受控环境 第15部分:通过空气中化学浓度评估设备和材料的使用适宜性

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration


GSO ISO 14644-15:2021 发布历史

GSO ISO 14644-15:2021由GSO 发布于 2021-07-01。

GSO ISO 14644-15:2021在国际标准分类中归属于: 13.040.35 清洁室(无菌室)及相关受控环境。

GSO ISO 14644-15:2021 洁净室和相关受控环境 第15部分:通过空气中化学浓度评估设备和材料的使用适宜性的最新版本是哪一版?

最新版本是 GSO ISO 14644-15:2021

GSO ISO 14644-15:2021的历代版本如下:

  • 2021年 GSO ISO 14644-15:2021 洁净室和相关受控环境 第15部分:通过空气中化学浓度评估设备和材料的使用适宜性

 

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8). The following are outside the scope of ISO 14644-15:2017: - health and safety requirements; - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment.

标准号
GSO ISO 14644-15:2021
发布
2021年
发布单位
GSO
当前最新
GSO ISO 14644-15:2021
 
 

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