GSO ISO 20146:2021

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges


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标准号
GSO ISO 20146:2021
发布
2021年
发布单位
GSO
当前最新
GSO ISO 20146:2021
 
 
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes ...

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