ISO/TR 22335:2007
表面化学分析.深度剖面.溅射速率测量:使用机械光针式轮廓仪的网眼复制法
Surface chemical analysis - Depth profiling - Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer
- 标准号
- ISO/TR 22335:2007
- 发布
- 2007年
- 发布单位
- 国际标准化组织
- 当前最新
- ISO/TR 22335:2007
- This Technical Report describes a method for determining ion-sputtering rates for depth profiling measurements with Auger electron spectroscopy (AES) and X-ray photoelectron spect...