VDI/VDE 2655 Blatt 1.2-2010

Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

VDI/VDE 2655 Blatt 1.2-2010 发布历史

The guideline describes procedures for the Calibration of confocal microscopes and depth setting standards for roughness measurement and establish thereby the basic for traceability of measuring systems to national standars. First the procedure of determination of the calibration abilities is described. Further basic conditions for the calibration as well as minimum requirements to the calibration procedure are specified. Finally the requirements to the calibration report are specified. A GUM conformal model for the determination of the uncertainty of measurement completes the instructions.

VDI/VDE 2655 Blatt 1.2-2010由德国机械工程师协会 DE-VDI 发布于 2010-10。

VDI/VDE 2655 Blatt 1.2-2010在国际标准分类中归属于: 17.180.01 光学和光学测量综合,37.020 光学设备。

VDI/VDE 2655 Blatt 1.2-2010的历代版本如下：

• 2009年09月01日 VDI/VDE 2655 Blatt 1.2-2009 Optische Messtechnik an Mikrotopografien - Kalibrieren von konfokalen Mikroskopen und Tiefeneinstellnormalen fuer die Rauheitsmessung
• 2010年10月 VDI/VDE 2655 Blatt 1.2-2010

非常抱歉，我们暂时无法提供预览，您可以试试： 免费下载 VDI/VDE 2655 Blatt 1.2-2010 前三页，或者稍后再访问。

注意： 点击下载后，生成下载文件时间比较长，请耐心等待......

标准号

VDI/VDE 2655 Blatt 1.2-2010

发布日期

2010年10月

实施日期

废止日期

无

国际标准分类号

17.180.01;37.020

发布单位

DE-VDI

适用范围

The guideline describes procedures for the Calibration of confocal microscopes and depth setting standards for roughness measurement and establish thereby the basic for traceability of measuring systems to national standars. First the procedure of determination of the calibration abilities is described. Further basic conditions for the calibration as well as minimum requirements to the calibration procedure are specified. Finally the requirements to the calibration report are specified. A GUM conformal model for the determination of the uncertainty of measurement completes the instructions.

谁引用了VDI/VDE 2655 Blatt 1.2-2010 更多引用