BS ISO 16413-2013 采用X射线反射计对薄膜厚度, 密度和接口宽度的评估. 仪器要求. 校准和定位, 数据收集, 数据分析和报告
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements alignment and positioning, data collection, data analysis and reporting