DIN EN ISO 14644-2-2016 洁净室和相关控制环境.第2部分:用粒子浓度监测提供与空气洁净度相关的洁净室性能的证据(ISO 14644-2-2015).德文版本EN ISO 14644-2-2015
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015); German version EN ISO 14644-2:2015