DIN EN ISO 14644-14:2017
洁净室和相关控制环境.第14部分:利用气载颗粒浓度评定设备的适合性(ISO 14644-14-2016);德文版本EN ISO 14644-14-2016
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016