23.160 真空技术 标准查询与下载
共找到 460 条与 真空技术 相关的标准，共 31 页
This document specifies methods and special requirements for measuring the maximum tolerable pressure difference, effective compression ratio, compression ratio with zero throughput and overflow valve pressure difference of mechanical booster vacuum pumps. It applies to mechanical booster vacuum pumps employed for medium vacuum or rough vacuum applications including gas-cooled mechanical booster vacuum pump and multiple mechanical booster vacuum pump systems. It covers particular characteristics of mechanical boosters that are different from those of the usual positive displacement vacuum pumps. Maximum tolerable pressure difference Δpmax, effective compression ratio Keff, compression ratio with zero throughput K0 and overflow valve pressure difference Δp1 are special characteristics of the performance of mechanical booster vacuum pumps.
Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
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- 23.160
- CCS
- 发布
- 2019-01-30
- 实施
Vacuum technology. Standard methods for measuring vacuum-pump performance. Turbomolecular vacuum pumps
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- 23.160
- CCS
- 发布
- 2018-08-23
- 实施
- 2018-08-23
This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: — information about throughputs and backing pressure of the turbomolecular vacuum pump; — the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).
Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps
- ICS
- 23.160
- CCS
- 发布
- 2018-07-00
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Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates
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- 23.160
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- 发布
- 2018-06-01
- 实施
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum. 1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Standard Specification for Dimensions of Knife-Edge Flanges
- ICS
- 23.160
- CCS
- 发布
- 2018-06-01
- 实施
Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement
- ICS
- 23.160
- CCS
- 发布
- 2018-04-01
- 实施
本标准规定了滑阀真空泵的术语和定义、型式与基本参数、基本要求、技术要求、试验方法、检验规则、标牌、标志、包装、运输和贮存、质量承诺。 本标准适用于单级、双级滑阀真空泵（以下简称泵）。
Rotary piston vacuum pump
- ICS
- 23.160
- CCS
- C344
- 发布
- 2018-02-01
- 实施
- 2018-02-06
Measuring methods of low pressures by discharge and ionization vacuum gauges
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- 23.160
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- 发布
- 2017-12-04
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Measuring methods of low pressures by discharge and ionization vacuum gauges
- ICS
- 23.160
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- 发布
- 2017-12-04
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Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for Pirani gauges
- ICS
- 23.160
- CCS
- 发布
- 2017-09-27
- 实施
- 2017-09-30
Vacuum technology. Bakeable flanges. Dimensions of knife-edge flanges
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- 23.160
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- J78
- 发布
- 2017-09-18
- 实施
- 2017-09-30
This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, this document defines procedures to characterize Pirani gauges for response time and hysteresis.
Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for Pirani gauges
- ICS
- 23.160
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- 发布
- 2017-09-00
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Vacuum technology — Bakeable flanges — Dimensions of knife-edge flanges
- ICS
- 23.160
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- 发布
- 2017-08-10
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Vacuum technology - Rules for the measurement of steam jet vacuum pumps and steam jet compressors - Motive fluid: steam
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- 23.160
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- J78
- 发布
- 2017-06
- 实施
本标准规定了多功能档案真空杀虫机（以下简称杀虫机）的术语和定义、规格、型号及基本参数、要求、试验方法、检验规则、标志和使用说明书、包装、运输、贮存等。 本标准适用于仅通过真空抽气使设备工作室内压力迅速下降，进而实现绝氧，在达到近乎绝对真空的状态下将纸质、绢丝、皮革、竹木等档案内的昆虫（如成虫、虫蛹、虫卵等）杀灭的，同时具有杀虫、保湿和除湿等功能的杀虫机。
Multifunctional Archives Vacuum Insect Killer
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- 23.160
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- J78
- 发布
- 2017-05-10
- 实施
- 2017-08-10
This part of ISO 21360 specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput. The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice. The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate. The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this part of ISO 21360 (e.g. measurement of power consumption), are defined in the specific pump standard.
Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 1: General description
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- 23.160
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- 发布
- 2016-12-22
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This part of ISO 9803 specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of non-bakable and non knife-edge flange for nominal bores from 10 mm to 250 mm of the R5 series.
Vacuum technology -- Mounting dimensions of pipeline fittings -- Part 1: Non knife-edge flange type
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- 23.160
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- 发布
- 2016-12-22
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