23.160 真空技术 标准查询与下载

ISO/TS 20177:2018 真空技术.真空计.测量和报告放气速率的程序

Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates

ASTM E2734/E2734M-10(2018) 刀刃法兰尺寸标准规格

1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum. 1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Standard Specification for Dimensions of Knife-Edge Flanges

ISO/TS 20175:2018 真空技术.真空计.分压测量用四极质谱仪的特性

Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

T/ZZB 0310-2018 滑阀真空泵

本标准规定了滑阀真空泵的术语和定义、型式与基本参数、基本要求、技术要求、试验方法、检验规则、标牌、标志、包装、运输和贮存、质量承诺。 本标准适用于单级、双级滑阀真空泵（以下简称泵）。

Rotary piston vacuum pump

KS B 0083-2017(2022) 用放电和电离真空计测量低压的方法

Measuring methods of low pressures by discharge and ionization vacuum gauges

KS B 0083-2017 测量低压方法因放电和电离真空计

Measuring methods of low pressures by discharge and ionization vacuum gauges

BS ISO 19685:2017 真空技术 真空计 皮拉尼压力计规范、校准和测量不确定度

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for Pirani gauges

BS ISO 3669:2017 真空技术.超高真空法兰.刀口法兰的尺寸规格

Vacuum technology. Bakeable flanges. Dimensions of knife-edge flanges

ISO 19685:2017 真空技术.真空计.皮拉尼真空计的规范、校准和测量不确定度

This document identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, this document defines procedures to characterize Pirani gauges for response time and hysteresis.

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for Pirani gauges

ISO 3669:2017 真空技术 - 可烘烤法兰 - 刀刃法兰尺寸

Vacuum technology — Bakeable flanges — Dimensions of knife-edge flanges

DIN 28430:2017 真空技术.蒸汽喷射真空泵和蒸汽喷射压缩机的测量规则.动力液:蒸汽

Vacuum technology - Rules for the measurement of steam jet vacuum pumps and steam jet compressors - Motive fluid: steam

DB44/T 1997-2017 多功能档案真空杀虫机

本标准规定了多功能档案真空杀虫机（以下简称杀虫机）的术语和定义、规格、型号及基本参数、要求、试验方法、检验规则、标志和使用说明书、包装、运输、贮存等。 本标准适用于仅通过真空抽气使设备工作室内压力迅速下降，进而实现绝氧，在达到近乎绝对真空的状态下将纸质、绢丝、皮革、竹木等档案内的昆虫（如成虫、虫蛹、虫卵等）杀灭的，同时具有杀虫、保湿和除湿等功能的杀虫机。

Multifunctional Archives Vacuum Insect Killer

JB/T 6921-2017 罗茨真空泵机组

Roots vacuum pump unit

JB/T 6533-2017 旋片真空泵

Rotary vane vacuum pump

JB/T 7674-2017 罗茨真空泵

Roots vacuum pump

GSO ISO 21360-1:2016 真空技术 测量真空泵性能的标准方法 第1部分：概述

This part of ISO 21360 specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput. The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice. The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate. The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this part of ISO 21360 (e.g. measurement of power consumption), are defined in the specific pump standard.

Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 1: General description

GSO ISO 9803-1:2016 真空技术 管道配件安装尺寸 第1部分：非刀口法兰型

This part of ISO 9803 specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of non-bakable and non knife-edge flange for nominal bores from 10 mm to 250 mm of the R5 series.

Vacuum technology -- Mounting dimensions of pipeline fittings -- Part 1: Non knife-edge flange type

GSO ISO 21358:2016 真空技术 直角阀 气动执行机构的尺寸和接口

This International Standard defines dimensions of right-angle valves that are compatible with the mounting dimensions of elbows defined in ISO 9803-1 and ISO 9803-2. This International Standard covers right-angle valves with flanges defined in ISO 2861-1, ISO 1609 and ISO 3669. ISO 3669 lists two flange series: — preferred series, and — secondary series. This International Standard covers only the valves with flanges of the secondary series.

Vacuum technology -- Right-angle valve -- Dimensions and interfaces for pneumatic actuator

GSO ISO 9803-2:2016 真空技术 管道配件安装尺寸 第2部分：刀口法兰式

This part of ISO 9803 specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of knife-edge flanges for nominal bores from 16 mm to 200 mm.

Vacuum technology -- Mounting dimensions of pipeline fittings -- Part 2: Knife-edge flange type

GSO ISO 21360-2:2016 真空技术 测量真空泵性能的标准方法 第2部分：正排量真空泵

This part of ISO 21360 specifies methods for measuring the volume flow rate, base pressure, water vapour tolerance, power consumption, and the lowest start-up temperature of positive displacement vacuum pumps, which discharge gas against atmospheric pressure and with a usual base pressure

Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 2: Positive displacement vacuum pumps