DIN EN 62047-8-2011
半导体设备.微机电设备.第8部分:薄膜拉伸性能测量用带弯曲试验方法(IEC 62047-8-2011).德文版 EN 62047-8-2011
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011); German version EN 62047-8:2011