VDI 2083 Blatt 8.1-2014
洁净室技术 空气洁净度化学浓度(ACC)

Cleanroom technology - Air cleanliness chemical concentration (ACC)


VDI 2083 Blatt 8.1-2014




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标准号
VDI 2083 Blatt 8.1-2014
发布
2014年
发布单位
德国机械工程师协会
 
 
引用标准
DIN EN 779:2012 DIN EN IS DIN EN ISO 13485:2012 DIN EN ISO 13485:2014 DIN EN ISO 14644-1:1999 DIN EN ISO 14644-1:2010 DIN EN ISO 14644-2:2001 DIN EN ISO 14644-2:2010 DIN EN ISO 14644-3:2006 DIN EN ISO 14644-4:2003 DIN EN ISO 9001:2008 DIN EN ISO 9001:2014
被代替标准
VDI 2083 Blatt 8.1-2009
适用范围
This standard deals with the chemical contamination of clean environments. It describes the phenomenon as such, metrology and control of air contamination by gaseous chemicals. This standard has been harmonised with the standard DIN EN ISO 14644-8; the latter, however does not addres the subjects of metrology or control of airborne chemical contamination (formerly termed AMC).

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