23.160 真空技术 标准查询与下载

GB/T 19956.2-2005 容积真空泵性能测量方法 第2部分;极限压力的测量

GB/T 19956的本部分规定了容积真空泵极限压力测量方法，所研究的泵是直接排大气的并且单级低于100Pa的入口极限压力。

Positive-displacement vacuum pumps.Measurement of performance characteristics.Part 2:Measurement of ultimate pressure

GB/T 19955.2-2005 蒸汽流真空泵性能测量方法 第2部分;临界前级压力的测量

GB/T 19955的本部分规定了测量蒸汽流真空泵临界前级压力的方法。 蒸汽流泵的性能对前级压力的依赖关系可用工作范围的入口压力和前级压力的关系曲线图来详尽描述。 一般情况下，按3.1所规定的用单一参数规定临界前级压力是合适的。但就某些情况而言，特别是超高真空性能或像氢和氦这样有关气体的情况，可能需要完整的曲线。 本部分所涉及的泵由下列3种油、汞蒸汽泵组成： ——蒸汽喷射真空泵； ——扩散泵； ——扩散喷射泵。

Vapour vacuum pumps.Measurement of performance characteristics.Part 2:Measurement of critical backing pressure

GB/T 19955.1-2005 蒸汽流真空泵性能测量方法 第1部分;体积流率(抽速)的测量

GB/T 19955的本部分规定了测量蒸汽流真空泵体积流率的方法。 本部分所涉及的泵由下列3种油、汞蒸汽泵组成： ——扩散泵； ——喷射泵； ——增压泵（即泵能在分子流和层流范围工作，具有扩散泵和喷射泵的组合性能）。 这些泵可以装或不装挡板或阱。

Vapour vacuum pumps.Measurement of performance characteristics.Part 1:Measurement of volume rate of flow (pumping speed)

GB/T 4983-2003 真空技术 快卸连接器 尺寸 第2部分:拧紧型

本标准规定了真空技术中使用的拧紧型连接器的尺寸和与连接器尾管相配合的“O”形密封圈及其衬套的尺寸。

Vacuum technology--Quick release couplings--Dimensions--Part 2:Screwed type

GB/T 4982-2003 真空技术 快卸连接器 尺寸 第1部分:夹紧型

本标准规定了真空技术中使用的夹紧型连接器的尺寸和与连接器相配合的“O”形密封圈及其支架的尺寸。

Vacuum technology--Quick release couplings--Dimensions--Part 1:Clamped type

GB/T 18193-2000 真空技术 质谱检漏仪校准

本标准规定了质谱检漏仪的校准程序。它仅适用于校准将灵敏元件处于高真空系统中的检漏仪。因此这个方法没有制订完整的验收试验。 本标准规定探索气体使用氦-4。但在适当的预防措施下，可以使用其他探索气体，如氩-40。 本标准的应用受到检漏仪不能测定小于10Pa·m·s漏率漏孔限制。 本标准程序提出了测定最小可检漏率和最小可检浓度比的两个要点。它分别应用于高真空和压力大于一个大气压的检漏仪上。

Vacuum technology-Mass-spectrometer-type leak detector calibration

GB/T 11164-1999 真空镀膜设备通用技术条件

本标准规定了真空镀膜设备技术要求、试验方法、检验规则、标志、包装、运输和贮存等。 本标准适用于压力在10～10Pa范围的蒸发类、溅射类、离子镀类真空镀膜设备（以下简称设备）。

Vacuum coating plant generic specification

GB/T 6070-1995 真空法兰

本标准非等效采用国际标准ISO 1609：1986《真空法兰》。 本标准适用于低、中、高真空设备的连接法兰。

Vacuum flanges

GB/T 3164-1993 真空技术系统图用图形符号

本标准规定了真空泵、真空阀门、挡板、阱、除尘、过滤器、真空管路及其连接，压力测量仪表、真空容器等八个部分的图形符号。 本标准适用于与真空技术有关的各种系统图。

Vacuum technology. Graphical symbols

GB/T 3163-1993 真空技术术语

本标准规定了真空技术方面的一般术语、真空泵术语、真空计术语、真空系统术语、真空检漏术语、真空镀膜技术术语、真空干燥术语、表面分析术语和真空冶金术语。 本标准适用于真空技术方面的技术文件、标准、书籍和手册等有关资料的编写。

Terminology for vacuum technology

GSO ISO 24477:2024 真空技术 真空计 旋转转子计的规格、校准和测量不确定度

This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges

GSO ISO/TS 20177:2024 真空技术 真空计 测量和报告排气速率的程序

This document describes procedures to measure outgassing rates from components designed for vacuum chambers and of vacuum chambers as a whole. The outgassing rates are expected to be lower than 10−5 Pa m3 s−1 (10−2 Pa L s−1) at 23 °C and to emerge from devices that are suitable for high or ultra-high vacuum applications. The molecular mass of the outgassing species or vapour is below 300 u. The upper limit 10−5 Pa m3 s−1 of total outgassing rate is specified independent of the size, the total surface area and texture or state of the outgassing material. If a specific outgassing rate (outgassing rate per area) is determined, the area is not a specific surface area including the surface roughness, but the nominal geometrical one. When it is difficult to determine the nominal geometrical surface area of the sample, such as powders, porous materials, very rough surfaces, or complex devices, mass specific outgassing rate (e.g. outgassing rate per gram) is used. For many practical applications, it is sufficient to determine the total outgassing rate. If a measuring instrument, which sensitivity is gas species dependent, is used, the total outgassing rate are given in nitrogen equivalent. In cases, however, where the total outgassing rate is too high, the disturbing gas species is identified, and its outgassing rate is measured in order to improve the sample material. This document covers both cases. Some outgassing molecules can adsorb on a surface with a residence time that is much longer than the total time of measurement. Such molecules cannot be detected by a detecting instrument when there is no direct line of sight. This is considered as a surface effect and surface analytical investigations are more useful than general outgassing rate measurements considered here. Also, molecules that are released from the surface by irradiation of UV light or X-rays, are out of the scope of this document. This document is written to standardize the measurement of outgassing rates in such a way that values obtained at different laboratories and by different methods are comparable. To this end, for any of the described methods, traceability is provided to the System International (SI) for the most important parameters of each method and according to the metrological level. Outgassing rate measurements by mass loss, which were mainly developed for testing of spacecraft and satellite materials, are not gas specific. For acceptable measurement times, mass loss measurements require significantly higher outgassing rates (>10−5 Pa m3 s−1) than typical for high and ultrahigh vacuum components. Also, it is not possible to measure the sample in situ due to the weight of the vacuum chamber, since the balances are not vacuum compatible. For these reasons, mass loss measurements are not considered in this document. It is assumed that the user of this document is familiar with high and ultra-high vacuum technology and the corresponding measuring instrumentation such as ionization gauges and quadrupole mass spectrometers.

Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates

T/QGCML 2110-2024 消防管道气密性检测设备

本文件规定了消防管道气密性检测设备的术语和定义、型号、技术要求、试验方法、检验规则及标志、包装、运输及贮存。 本规范适用于消防管道气密性检测设备的设计及检验。

Fire pipe air tightness testing equipment

BS ISO 21360-6:2023 真空技术 测量真空泵性能的标准方法 低温真空泵

Vacuum technology. Standard methods for measuring vacuum-pump performance - Cryogenic vacuum pumps

BS ISO 21360-5:2023 真空技术 测量真空泵性能的标准方法 非蒸发吸气剂 (NEG) 真空泵

Vacuum technology. Standard methods for measuring vacuum-pump performance - Non-evaporable getter (NEG) vacuum pumps

T/QGCML 2110-2023 消防管道气密性检测设备

本文件规定了消防管道气密性检测设备的术语和定义、型号、技术要求、试验方法、检验规则及标志、包装、运输及贮存。 本规范适用于消防管道气密性检测设备的设计及检验。

Fire pipe air tightness testing equipment

ASTM F2647-07(2023) 安装CVS（中央真空系统）的批准方法的标准指南

Standard Guide for Approved Methods of Installing a CVS (Central Vacuum System)

T/ZBZLXH 003-2023 泵类产品主数据标准

本文件适用于指导泵及真空设备行业各参与方如何对在应用工业互联网标识对本行业各类对象进行标识、加工、管理、维护时产生的数据进行存储记录、使用、共享、交换和查询。

Pump Product Master Digital Language Standard

ISO 21360-5:2023 真空技术 — 测量真空泵性能的标准方法 — 第 5 部分：非蒸发吸气剂 (NEG) 真空泵

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps

T/QGCML 1178-2023 真空镀膜在线清洗装置

本文件规定了真空镀膜在线清洗装置的术语和定义、构成及原理、技术要求、试验方法、检验规则、标志、包装、运输及贮存。 本文件适用于真空镀膜在线清洗装置的设计、制造和检验。

Vacuum coating online cleaning device