DIN EN ISO 14644-2:2001 洁净室和相关控制环境.第2部分:证实与ISO 14644-1(ISO 14644-2:2000) 保持一致的试验和监测规范 德文版本 EN ISO 14644-2:2000
Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 (ISO 14644-2:2000); German version EN ISO 14644-2:2000