PNS ISO 14644-15-2021 洁净室和相关受控环境.第15部分:通过气载化学浓度评估设备和材料的适用性
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
This Standard provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemica