PNS ISO 14644-15-2021
洁净室和相关受控环境.第15部分:通过气载化学浓度评估设备和材料的适用性

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration


PNS ISO 14644-15-2021 发布历史

This Standard provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemica

PNS ISO 14644-15-2021由PH-BPS 发布于 2021。

PNS ISO 14644-15-2021 在中国标准分类中归属于: C65/74 劳动安全技术,在国际标准分类中归属于: 13.040.35 清洁室(无菌室)及相关受控环境。

PNS ISO 14644-15-2021的历代版本如下:

  • 2021年 PNS ISO 14644-15-2021 洁净室和相关受控环境.第15部分:通过气载化学浓度评估设备和材料的适用性

 

 

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标准号
PNS ISO 14644-15-2021
发布日期
2021年
实施日期
废止日期
中国标准分类号
C65/74
国际标准分类号
13.040.35
发布单位
PH-BPS
适用范围
This Standard provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemica

PNS ISO 14644-15-2021系列标准





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